fundamentals of semiconductor manufacturing and process control

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Fundamentals Of Semiconductor Manufacturing And Process Control

Author : Gary S. May
ISBN : 9780471790273
Genre : Technology & Engineering
File Size : 85. 31 MB
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A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.

Fundamentals Of Semiconductor Processing Technology

Author : Badih El-Kareh
ISBN : 9781461522096
Genre : Technology & Engineering
File Size : 27. 86 MB
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The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufac turing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabil ities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modem tech nologies. This book is written with the need for a "bridge" between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semi conductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and cir cuits, their electrical parameters, reliability, and yield.

Fundamentals Of Stream Processing

Author : Henrique C. M. Andrade
ISBN : 9781107434004
Genre : Technology & Engineering
File Size : 86. 46 MB
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Stream processing is a novel distributed computing paradigm that supports the gathering, processing and analysis of high-volume, heterogeneous, continuous data streams, to extract insights and actionable results in real time. This comprehensive, hands-on guide combining the fundamental building blocks and emerging research in stream processing is ideal for application designers, system builders, analytic developers, as well as students and researchers in the field. This book introduces the key components of the stream computing paradigm, including the distributed system infrastructure, the programming model, design patterns and streaming analytics. The explanation of the underlying theoretical principles, illustrative examples and implementations using the IBM InfoSphere Streams SPL language and real-world case studies provide students and practitioners with a comprehensive understanding of such applications and the middleware that supports them.

Advanced Nanoscale Ulsi Interconnects Fundamentals And Applications

Author : Yosi Shacham-Diamand
ISBN : 0387958681
Genre : Science
File Size : 36. 81 MB
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In Advanced ULSI interconnects – fundamentals and applications we bring a comprehensive description of copper-based interconnect technology for ultra-lar- scale integration (ULSI) technology for integrated circuit (IC) application. In- grated circuit technology is the base for all modern electronics systems. You can ?nd electronics systems today everywhere: from toys and home appliances to a- planes and space shuttles. Electronics systems form the hardware that together with software are the bases of the modern information society. The rapid growth and vast exploitation of modern electronics system create a strong demand for new and improved electronic circuits as demonstrated by the amazing progress in the ?eld of ULSI technology. This progress is well described by the famous “Moore’s law” which states, in its most general form, that all the metrics that describe integrated circuit performance (e. g. , speed, number of devices, chip area) improve expon- tially as a function of time. For example, the number of components per chip d- bles every 18 months and the critical dimension on a chip has shrunk by 50% every 2 years on average in the last 30 years. This rapid growth in integrated circuits te- nology results in highly complex integrated circuits with an increasing number of interconnects on chips and between the chip and its package. The complexity of the interconnect network on chips involves an increasing number of metal lines per interconnect level, more interconnect levels, and at the same time a reduction in the interconnect line critical dimensions.

Handbook For Cleaning For Semiconductor Manufacturing

Author : Karen A. Reinhardt
ISBN : 1118099516
Genre : Technology & Engineering
File Size : 44. 82 MB
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This comprehensive volume provides an in-depth discussion of thefundamentals of cleaning and surface conditioning of semiconductorapplications such as high-k/metal gate cleaning, copper/low-kcleaning, high dose implant stripping, and silicon and SiGepassivation. The theory and fundamental physics associated with wetetching and wet cleaning is reviewed, plus the surface andcolloidal aspects of wet processing. Formulation developmentpractices and methodology are presented along with the applicationsfor preventing copper corrosion, cleaning aluminum lines, and othersensitive layers. This is a must-have reference for any engineer ormanager associated with using or supplying cleaning andcontamination free technologies for semiconductor manufacturing. From the Reviews... "This handbook will be a valuable resource for many academiclibraries. Many engineering librarians who work with a variety ofprograms (including, but not limited to Materials Engineering)should include this work in their collection. My recommendation isto add this work to any collection that serves a campus with amaterials/manufacturing/electrical/computer engineering programsand campuses with departments of physics and/or chemistry withlarge graduate-level enrollment." —Randy Wallace, Department Head, Discovery ParkLibrary, University of North Texas

Handbook Of Semiconductor Manufacturing Technology Second Edition

Author : Yoshio Nishi
ISBN : 1420017667
Genre : Technology & Engineering
File Size : 37. 26 MB
Format : PDF
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Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

Mathematics Of Stochastic Manufacturing Systems

Author : George Yin
ISBN : 0821897020
Genre : Business & Economics
File Size : 37. 67 MB
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In this volume, leading experts in mathematical manufacturing research and related fields review and update recent advances of mathematics in stochastic manufacturing systems and attempt to bridge the gap between theory and applications. The topics covered include scheduling and production planning, modeling of manufacturing systems, hierarchical control for large and complex systems, Markov chains, queueing networks, numerical methods for system approximations, singular perturbed systems, risk-sensitive control, stochastic optimization methods, discrete event systems, and statistical quality control.

Semiconductor Manufacturing Handbook Second Edition

Author : Hwaiyu Geng
ISBN : 125958769X
Genre : Technology & Engineering
File Size : 32. 41 MB
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Thoroughly Revised, State-of-the-Art Semiconductor Design, Manufacturing, and Operations Information Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, covers the emerging technologies that enable the Internet of Things, the Industrial Internet of Things, data analytics, artificial intelligence, augmented reality, and and smart manufacturing. You will get complete details on semiconductor fundamentals, front- and back-end processes, nanotechnology, photovoltaics, gases and chemicals, fab yield, and operations and facilities. •Nanotechnology and microsystems manufacturing •FinFET and nanoscale silicide formation •Physical design for high-performance, low-power 3D circuits •Epitaxi, anneals, RTP, and oxidation •Microlithography, etching, and ion implantations •Physical, chemical, electrochemical, and atomic layer vapor deposition •Chemical mechanical planarization •Atomic force metrology •Packaging, bonding, and interconnects •Flexible hybrid electronics •Flat-panel,flexible display electronics, and photovoltaics •Gas distribution systems •Ultrapure water and filtration •Process chemicals handling and abatement •Chemical and slurry handling systems •Yield management, CIM, and factory automation •Manufacturing execution systems •Advanced process control •Airborne molecular contamination •ESD controls in clean-room environments •Vacuum systems and RF plasma systems •IC manufacturing parts cleaning technology •Vibration and noise design •And much more

Microchip Fabrication Sixth Edition

Author : Peter Van Zant
ISBN : 9780071821025
Genre : Technology & Engineering
File Size : 77. 97 MB
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The most complete, current guide to semiconductor processing Fully revised to cover the latest advances in the field, Microchip Fabrication, Sixth Edition explains every stage of semiconductor processing, from raw material preparation to testing to packaging and shipping the finished device. This practical resource provides easy-to-understand information on the physics, chemistry, and electronic fundamentals underlying the sophisticated manufacturing materials and processes of modern semiconductors. State-of-the-art processes and cutting-edge technologies used in the patterning, doping, and layering steps are discussed in this new edition. Filled with detailed illustrations and real-world examples, this is a comprehensive, up-to-date introduction to the technological backbone of the high-tech industry. COVERAGE INCLUDES: The semiconductor industry Properties of semiconductor materials and chemicals Crystal growth and silicon wafer preparation Wafer fabrication and packaging Contamination control Productivity and process yields Oxidation The ten-step patterning process--surface preparation to exposure; developing to final inspection Next generation lithography Doping Layer deposition Metallization Process and device evaluation The business of wafer fabrication Devices and integrated circuit formation Integrated circuits Packaging

Fundamentals Of Food Biotechnology

Author : Byong H. Lee
ISBN : 9781118384916
Genre : Science
File Size : 71. 68 MB
Format : PDF, ePub
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Food biotechnology is the application of modern biotechnologicaltechniques to the manufacture and processing of food, for examplethrough fermentation of food (which is the oldest biotechnologicalprocess) and food additives, as well as plant and animal cellcultures. New developments in fermentation and enzyme technologicalprocesses, molecular thermodynamics, genetic engineering, proteinengineering, metabolic engineering, bioengineering, and processesinvolving monoclonal antibodies, nanobiotechnology and quorumsensing have introduced exciting new dimensions to foodbiotechnology, a burgeoning field that transcends many scientificdisciplines. Fundamentals of Food Biotechnology, 2nd edition is basedon the author’s 25 years of experience teaching on a foodbiotechnology course at McGill University in Canada. The book willappeal to professional food scientists as well as graduate andadvanced undergraduate students by addressing the latest excitingfood biotechnology research in areas such as genetically modifiedfoods (GMOs), bioenergy, bioplastics, functionalfoods/nutraceuticals, nanobiotechnology, quorum sensing andquenching. In addition, cloning techniques for bacterial and yeastenzymes are included in a “New Trends and Tools”section and selected references, questions and answers appear atthe end of each chapter. This new edition has been comprehensively rewritten andrestructured to reflect the new technologies, products and trendsthat have emerged since the original book. Many new aspectshighlight the short and longer term commercial potential of foodbiotechnology.

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