lecture notes on principles of plasma processing

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Lecture Notes On Principles Of Plasma Processing

Author : Francis F. Chen
ISBN : 9781461501817
Genre : Science
File Size : 79. 40 MB
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Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.

Plasma Technology For Hyperfunctional Surfaces

Author : Hubert Rauscher
ISBN : 3527630465
Genre : Technology & Engineering
File Size : 46. 23 MB
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Based on a project backed by the European Union, this is a must-have resource for researchers in industry and academia concerned with application-oriented plasma technology research. Clearly divided in three sections, the first part is dedicated to the fundamentals of plasma and offers information about scientific and theoretical plasma topics, plasma production, surface treatment process and characterization. The second section focuses on technological aspects and plasma process applications in textile, food packaging and biomedical sectors, while the final part is devoted to concerns about the environmental sustainability of plasma processes.


Author : Walter Greiner
ISBN : 3817117655
Genre : Quantum theory
File Size : 43. 57 MB
Format : PDF
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Non Thermal Plasma Technology For Polymeric Materials

Author : Sabu Thomas
ISBN : 9780128131534
Genre : Technology & Engineering
File Size : 20. 58 MB
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Non-Thermal Plasma Technology for Polymeric Materials: Applications in Composites, Nanostructured Materials and Biomedical Fields provides both an introduction and practical guide to plasma synthesis, modification and processing of polymers, their composites, nancomposites, blends, IPNs and gels. It examines the current state-of-the-art and new challenges in the field, including the use of plasma treatment to enhance adhesion, characterization techniques, and the environmental aspects of the process. Particular attention is paid to the effects on the final properties of composites and the characterization of fiber/polymer surface interactions. This book helps demystify the process of plasma polymerization, providing a thorough grounding in the fundamentals of plasma technology as they relate to polymers. It is ideal for materials scientists, polymer chemists, and engineers, acting as a guide to further research into new applications of this technology in the real world. Enables materials scientists and engineers to deploy plasma technology for surface treatment, characterization and analysis of polymeric materials Reviews the state-of-the-art in plasma technology for polymer synthesis and processing Presents detailed coverage of the most advanced applications for plasma polymerization, particularly in medicine and biomedical engineering, areas such as implants, biosensors and tissue engineering

Adhesion In Microelectronics

Author : K. L. Mittal
ISBN : 9781118831342
Genre : Technology & Engineering
File Size : 59. 82 MB
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This comprehensive book will provide both fundamental andapplied aspects of adhesion pertaining to microelectronics in asingle and easily accessible source. Among the topics to be coveredinclude; Various theories or mechanisms of adhesion Surface (physical or chemical) characterization of materials asit pertains to adhesion Surface cleaning as it pertains to adhesion Ways to improve adhesion Unraveling of interfacial interactions using an array ofpertinent techniques Characterization of interfaces / interphases Polymer-polymer adhesion Metal-polymer adhesion (metallized polymers) Polymer adhesion to various substrates Adhesion of thin films Adhesion of underfills Adhesion of molding compounds Adhesion of different dielectric materials Delamination and reliability issues in packaged devices Interface mechanics and crack propagation Adhesion measurement of thin films and coatings

Atom Und Quantenphysik

Author : Hermann Haken
ISBN : 9783642185199
Genre : Science
File Size : 50. 51 MB
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"...Einer der Vorteile dieses Lehrbuchs beruht auf der Zusammenarbeit zwischen Experimentalphysiker und Theoretiker als Autoren, wobei beide international bekannte und geschätzte Wissenschaftler sind. Dadurch kommen beide Aspekte der Quantenphysik, die entscheidenden Experimente und das mathematische Gerüst, zur Geltung..." (Physikalische Blätter)

Statistische Physik Und Theorie Der W Rme

Author : Frederick Reif
ISBN : 9783110860931
Genre : Science
File Size : 59. 98 MB
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The Journal Of The Korean Physical Society

Author :
ISBN : CHI:81571053
Genre : Physics
File Size : 32. 22 MB
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American Book Publishing Record

Author :
ISBN : UOM:39015066043137
Genre : American literature
File Size : 80. 15 MB
Format : PDF
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Lehrbuch Der Plasmaphysik Und Magnetohydrodynamik

Author : Ferdinand Cap
ISBN : 9783709166222
Genre : Science
File Size : 84. 19 MB
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