nanofabrication principles capabilities and limits

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Nanofabrication

Author : Zheng Cui
ISBN : 9783319393612
Genre : Technology & Engineering
File Size : 44. 23 MB
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This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.

Nanofabrication

Author : Maria Stepanova
ISBN : 3709104246
Genre : Technology & Engineering
File Size : 87. 58 MB
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Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

Nanoimprint Lithography An Enabling Process For Nanofabrication

Author : Weimin Zhou
ISBN : 9783642344282
Genre : Technology & Engineering
File Size : 40. 38 MB
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Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application. This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology. Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.

Principles Of Electron Optics Volume 2

Author : Peter W. Hawkes
ISBN : 9780128134054
Genre : Science
File Size : 71. 79 MB
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Principles of Electron Optics: Applied Geometrical Optics, Second Edition gives detailed information about the many optical elements that use the theory presented in Volume 1: electrostatic and magnetic lenses, quadrupoles, cathode-lens-based instruments including the new ultrafast microscopes, low-energy-electron microscopes and photoemission electron microscopes and the mirrors found in their systems, Wien filters and deflectors. The chapter on aberration correction is largely new. The long section on electron guns describes recent theories and covers multi-column systems and carbon nanotube emitters. Monochromators are included in the section on curved-axis systems. The lists of references include many articles that will enable the reader to go deeper into the subjects discussed in the text. The book is intended for postgraduate students and teachers in physics and electron optics, as well as researchers and scientists in academia and industry working in the field of electron optics, electron and ion microscopy and nanolithography. Offers a fully revised and expanded new edition based on the latest research developments in electron optics Written by the top experts in the field Covers every significant advance in electron optics since the subject originated Contains exceptionally complete and carefully selected references and notes Serves both as a reference and text

Near Field Nano Optics

Author : Motoichi Ohtsu
ISBN : 9781461548355
Genre : Technology & Engineering
File Size : 44. 8 MB
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Conventional optical science and technology have been restricted by the diffraction limit from reducing the sizes of optical and photoruc devices to nanometric dimensions. Thus, the size of optical integrated circuits has been incompatible with that of their counterpart, integrated electronic circuits, which have much smaller dimensions. This book provides potential ideas and methods to overcome this difficulty. Near-field optics has developed very rapidly from around the middle 1980s after preliminary trials in the microwave frequency region, as proposed as early as 1928. At the early stages of this development, most technical efforts were devoted to realizing super-high-resolution optical microscopy beyond the diffraction limit. However, the possibility of exploiting the optical near-field, phenomenon of quasistatic electromagnetic interaction at subwavelength distances between nanometric particles has opened new ways to nanometric optical science and technology, and many applications to nanometric fabrication and manipulation have been proposed and implemented. Building on this historical background, this book describes recent progress in near-field optical science and technology, mainly using research of the author's groups. The title of this book, Near-Field Nano-Optics-From Basic Principles to Nano-Fabrication and Nano-Photonics, implies capabilities of the optical near field not only for imaging/microscopy, but also for fabrication/manipulation/proc essing on a nanometric scale.

Microfabrication For Industrial Applications

Author : Regina Luttge
ISBN : 9780815519775
Genre : Technology & Engineering
File Size : 77. 42 MB
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This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling

Nanotechnology Enabled Sensors

Author : Kourosh Kalantar-zadeh
ISBN : 9780387680231
Genre : Technology & Engineering
File Size : 85. 69 MB
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Nanotechnology provides tools for creating functional materials, devices, and systems by controlling materials at the atomic and molecular scales and making use of novel properties and phenomena. Nanotechnology-enabled sensors find applications in several fields such as health and safety, medicine, process control and diagnostics. This book provides the reader with information on how nanotechnology enabled sensors are currently being used and how they will be used in the future in such diverse fields as communications, building and facilities, medicine, safety, and security, including both homeland defense and military operations.

Building Intuition

Author : Dilip Chhajed
ISBN : 0387736999
Genre : Business & Economics
File Size : 81. 37 MB
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This is the first book in the field that uses the power of the basic models and principles to provide students and managers with an "intuitive understanding" of operations management. The book touches on nine fundamental models and principles, and outlines the key insights behind each one. Some of the very biggest names in the Management Science field have developed and carefully written these chapters on the field’s basic models.

Experimental Beam System Studies Of Plasma Polymer Interactions

Author : Dustin George Nest
ISBN : UCAL:C3521530
Genre :
File Size : 44. 16 MB
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Electrochemical Micromachining For Nanofabrication Mems And Nanotechnology

Author : Bijoy Bhattacharyya
ISBN : 9780323352888
Genre : Science
File Size : 25. 31 MB
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Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)

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