optical diagnostics for thin film processing

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Optical Diagnostics For Thin Film Processing

Author : Irving P. Herman
ISBN : 0080538088
Genre : Technology & Engineering
File Size : 76. 10 MB
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This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control. Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field. The only volume that comprehensively explores in situ, real-time, optical probes for all types of thin film processing Useful as an introduction to the subject or as a resource handbook Covers a wide range of thin film processes including plasma etching, MBE, MOCVD, and rapid thermal processing Examples emphasize applications in microelectronics and optoelectronics Introductory chapter serves as a guide to all optical diagnostics and their applications Each chapter presents the underlying principles, experimental implementation, and applications for a specific optical diagnostic

Handbook Of Thin Film Process Technology

Author : D Glocker
ISBN : 9781351089692
Genre : Technology & Engineering
File Size : 41. 20 MB
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The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials.

Database Needs For Modeling And Simulation Of Plasma Processing

Author : Panel on Database Needs in Plasma Processing
ISBN : 9780309573535
Genre : Science
File Size : 77. 36 MB
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In spite of its high cost and technical importance, plasma equipment is still largely designed empirically, with little help from computer simulation. Plasma process control is rudimentary. Optimization of plasma reactor operation, including adjustments to deal with increasingly stringent controls on plant emissions, is performed predominantly by trial and error. There is now a strong and growing economic incentive to improve on the traditional methods of plasma reactor and process design, optimization, and control. An obvious strategy for both chip manufacturers and plasma equipment suppliers is to employ large-scale modeling and simulation. The major roadblock to further development of this promising strategy is the lack of a database for the many physical and chemical processes that occur in the plasma. The data that are currently available are often scattered throughout the scientific literature, and assessments of their reliability are usually unavailable. Database Needs for Modeling and Simulation of Plasma Processing identifies strategies to add data to the existing database, to improve access to the database, and to assess the reliability of the available data. In addition to identifying the most important needs, this report assesses the experimental and theoretical/computational techniques that can be used, or must be developed, in order to begin to satisfy these needs.

Feedback Control Of Mems To Atoms

Author : Jason J. Gorman
ISBN : 9781441958327
Genre : Technology & Engineering
File Size : 78. 1 MB
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Control from MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated systems. The book is organized according to the dimensional scale of the problem, starting with micro-scale systems and ending with atomic-scale systems. Similar to macro-scale machines and processes, control systems can play a major role in improving the performance of micro- and nano-scale systems and in enabling new capabilities that would otherwise not be possible. However, the majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry.

Optical Engineering

Author :
ISBN : CORNELL:31924077898520
Genre : Optical instruments
File Size : 88. 71 MB
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Publishes papers reporting on research and development in optical science and engineering and the practical applications of known optical science, engineering, and technology.

In Situ Characterization Of Thin Film Growth

Author : Gertjan Koster
ISBN : 9780857094957
Genre : Technology & Engineering
File Size : 49. 80 MB
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Advanced techniques for characterizing thin film growth in situ help to develop improved understanding and faster diagnosis of issues with the process. In situ characterization of thin film growth reviews current and developing techniques for characterizing the growth of thin films, covering an important gap in research. Part one covers electron diffraction techniques for in situ study of thin film growth, including chapters on topics such as reflection high-energy electron diffraction (RHEED) and inelastic scattering techniques. Part two focuses on photoemission techniques, with chapters covering ultraviolet photoemission spectroscopy (UPS), X-ray photoelectron spectroscopy (XPS) and in situ spectroscopic ellipsometry for characterization of thin film growth. Finally, part three discusses alternative in situ characterization techniques. Chapters focus on topics such as ion beam surface characterization, real time in situ surface monitoring of thin film growth, deposition vapour monitoring and the use of surface x-ray diffraction for studying epitaxial film growth. With its distinguished editors and international team of contributors, In situ characterization of thin film growth is a standard reference for materials scientists and engineers in the electronics and photonics industries, as well as all those with an academic research interest in this area. Chapters review electron diffraction techniques, including the methodology for observations and measurements Discusses the principles and applications of photoemission techniques Examines alternative in situ characterisation techniques

Physics Of The Human Body

Author : Irving P. Herman
ISBN : 9783319239323
Genre : Science
File Size : 63. 66 MB
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This book comprehensively addresses the physics and engineering aspects of human physiology by using and building on first-year college physics and mathematics. Topics include the mechanics of the static body and the body in motion, the mechanical properties of the body, muscles in the body, the energetics of body metabolism, fluid flow in the cardiovascular and respiratory systems, the acoustics of sound waves in speaking and hearing, vision and the optics of the eye, the electrical properties of the body, and the basic engineering principles of feedback and control in regulating all aspects of function. The goal of this text is to clearly explain the physics issues concerning the human body, in part by developing and then using simple and subsequently more refined models of the macrophysics of the human body. Many chapters include a brief review of the underlying physics. There are problems at the end of each chapter; solutions to selected problems are also provided. This second edition enhances the treatments of the physics of motion, sports, and diseases and disorders, and integrates discussions of these topics as they appear throughout the book. Also, it briefly addresses physical measurements of and in the body, and offers a broader selection of problems, which, as in the first edition, are geared to a range of student levels. This text is geared to undergraduates interested in physics, medical applications of physics, quantitative physiology, medicine, and biomedical engineering.

Optical Materials And Applications

Author : Arnold Rosental
ISBN : 0819459534
Genre : Science
File Size : 31. 36 MB
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Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Thin Film Micro Optics

Author : Ruediger Grunwald
ISBN : 0080471250
Genre : Technology & Engineering
File Size : 33. 83 MB
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"Thin-film microoptics" stands for novel types of microoptical components and systems which combine the well-known features of miniaturized optical elements with the specific advantages of thin optical layers. This approach enables for innovative solutions in shaping light fields in spatial, temporal and spectral domain. Low-dispersion and small-angle systems for tailoring and diagnosing laser pulses under extreme conditions as well as VUV-capable microoptics can be realized. Continuous-relief microstructures of refractive, reflective and hybrid characteristics are obtained by vapor deposition technologies with shadow masks in rotating systems. The book gives a comprehensive overview on fundamental laws of microoptics, types of thin-film microoptical components, methods and constraints of their design, fabrication and characterization, structure transfer into substrates, optical functions and applications. Recent theoretical and experimental results of basic and applied research are addressed. Particular emphasis will be laid on the generation of localized, nondiffracting few-cycle wavepackets of extended depth of focus and high tolerance against distortions. It is shown that the spectral interference of ultrabroadband conical beams results in spatio-temporal structures of characteristic X-shape, so-called X-waves, which are interesting for robust optical communication. New prospects are opened by exploiting small conical angles from nanolayer microoptics and self-apodized truncation of Bessel beams leading to the formation of single-maximum nondiffracting beams or "needle beams". Thin-film microoptical beam shapers have an enormous potential for future applications like the two-dimensional ultrafast optical processing, multichannel laser-matter interaction, nonlinear spectroscopy or advanced measuring techniques. - Introduces a new and promising branch of microoptics - Gives a compact overview on the types, properties and applications of the most important microoptical components containing valuable data and facts - Helps to understand the basic optical laws - Reports on the historical development line of thin-film microoptics - Provides brand new results of research and development in the field of ultrashort-pulse laser beam shaping and diagnostics - Discusses the future trends and first approaches of next generation microoptics - Contains a carefully assorted glossary of the most important technical terms

Crystal Growth In Space And Related Optical Diagnostics

Author : Ravindra Behari Lal
ISBN : UOM:39015025257919
Genre : Science
File Size : 87. 76 MB
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