optical microscanners and microspectrometers using thermal bimorph actuators microsystems

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Optical Microscanners And Microspectrometers Using Thermal Bimorph Actuators

Author : Gerhard Lammel
ISBN : 9781475760835
Genre : Technology & Engineering
File Size : 24. 14 MB
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Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly. An advanced microscanning device capable of one- and two-dimensional scanning can be integrated in a compact barcode scanning system composed of a laser diode and adapted optics. The original design of the microscanner combines efficiently the miniaturized thermal mechanical actuator and the reflecting mirror, providing a one-dimensional scanning or an unique combination of two movements, depending on the geometry. The simplicity of the device makes it a competitive component. The authors rethink the design of a miniaturized optical device and find a compact solution for a microspectrometer, based on a tunable filter and a single pixel detector. A porous silicon technology combines efficiently the optical filter function with a thermal mechanical actuator on chip. The methodology for design and process calibration are discussed in detail. The device is the core component of an infrared gas spectrometer.

Mems Nems

Author : Cornelius T. Leondes
ISBN : 9780387257860
Genre : Technology & Engineering
File Size : 86. 8 MB
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This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Principles And Applications Of Nanomems Physics

Author : Hector Santos
ISBN : 9780387258348
Genre : Technology & Engineering
File Size : 20. 18 MB
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Presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications Provides newcomers with a much needed coherent scientific base for undertaking study and research in this field Takes great pains in rendering transparent advanced physical concepts and techniques, such as quantum information, second quantization, Luttinger liquids, bosonization, and superconductivity

Biomems

Author : Gerald Urban
ISBN : 9780387287324
Genre : Medical
File Size : 50. 43 MB
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Explosive growth in the field of microsystem technology (MST) has introduced a variety of promising products in major disciplines from microelectronics to life sciences. Especially the life sciences and health care business was, and is expected to be a major market for MST products. Undoubtedly the merging of biological sciences with micro- and nanoscience will create a scientific and technological revolution in future. Microminiaturization of devices, down to the nanoscale, approaching the size of biological structures, will be a prerequisite for the future success of life sciences. Bioanalytical and therapeutic micro- and nanosystems will be mandatory for system biologists in the long run, to obtain insight into morphology, the function and the interactive processes of the living system. With such a deeper understanding new and personalized drugs could be developed leading to a revolution in life sciences. Today, microanalytical devices are used in clinical analytics or molecular biology as gene chips. In parallel, standard microbiomedical products are employed in the intensive care and surgical theatre, mainly for monitoring and implantation purposes. The gap between these two different scientific fields will be closed, however, as soon as functional micro devices can be produced, allowing a deeper view into the function of cells and whole organisms. Here, a new discipline evolved which focuses on microsystems for living systems called "BIOMEMS". In this review at a glance the exciting field of bio-microsystems, from their beginnings to indicators of future successes are presented. It will also show that a broad penetration of micro and nano technologies into biology and medicine will be mandatory for future scientific and new product development progress in life science.

Smart Structures Devices And Systems

Author : Said F. Al-Sarawi
ISBN : 0819456098
Genre : Microelectromechanical systems
File Size : 80. 6 MB
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Mechanical Engineers Handbook Instrumentation Systems Controls And Mems

Author : Myer Kutz
ISBN : 0471719862
Genre : Technology & Engineering
File Size : 21. 13 MB
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The updated Revision of the Bestseller--In a more Useful Format! Mechanical Engineers' Handbook has a long tradition as a single resource of valuable information related to specialty areas in the diverse industries and job functions in which mechanical engineers work. This Third Edition, the most aggressive revision to date, goes beyond the straight data, formulas, and calculations provided in other handbooks and focuses on authoritative discussions, real-world examples, and insightful analyses while covering more topics that in previous editions. Book 2: Instrumentation, Systems, Controls, and MEMS is comprised of two major parts, conveniently put together because feedback control systems require measurement transducers. The first part covers instrumentation, including transducer design, strain gages, flow meters, digital integrated circuits, and issues involved in processing transducer signals and acquiring and displaying data. The second part addresses systems and control, including: * Control system design, analysis, and performance modification * Design of servoactuators, controllers, and general-purpose control devices * "New departures" in mechanical engineering, including neural networks, mechatronics, and MEMS

Introduction To Microsystem Design

Author : Werner Karl Schomburg
ISBN : 9783662470237
Genre : Technology & Engineering
File Size : 45. 91 MB
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This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.

Optical Mems Nanophotonics And Their Applications

Author : Guangya Zhou
ISBN : 9781351647601
Genre : Technology & Engineering
File Size : 42. 97 MB
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This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.

Vehicle Dynamics And Control

Author : Rajesh Rajamani
ISBN : 9781461414322
Genre : Technology & Engineering
File Size : 55. 69 MB
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Vehicle Dynamics and Control provides a comprehensive coverage of vehicle control systems and the dynamic models used in the development of these control systems. The control system applications covered in the book include cruise control, adaptive cruise control, ABS, automated lane keeping, automated highway systems, yaw stability control, engine control, passive, active and semi-active suspensions, tire-road friction coefficient estimation, rollover prevention, and hybrid electric vehicles. In developing the dynamic model for each application, an effort is made to both keep the model simple enough for control system design but at the same time rich enough to capture the essential features of the dynamics. A special effort has been made to explain the several different tire models commonly used in literature and to interpret them physically. In the second edition of the book, chapters on roll dynamics, rollover prevention and hybrid electric vehicles have been added, and the chapter on electronic stability control has been enhanced. The use of feedback control systems on automobiles is growing rapidly. This book is intended to serve as a useful resource to researchers who work on the development of such control systems, both in the automotive industry and at universities. The book can also serve as a textbook for a graduate level course on Vehicle Dynamics and Control.

Actuators

Author : Hartmut Janocha
ISBN : 9783662055878
Genre : Technology & Engineering
File Size : 44. 42 MB
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Authored by a team of acknowledged experts, this book presents a multidisciplinary view of the state of the art in the field of actuators. The goal of the book is to provide a comprehensive overview of the properties, applications, and potential applications of traditional and unconventional actuators, together with their corresponding power electronics. Special attention is paid to the objective assessment of competing actuator principles. The book is written primarily for designers and engineers in research and development, but will also be valuable as a textbook for students of automation engineering, mechatronics and adaptronics.

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