scientific wet process technology for innovative lsi fpd manufacturing

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Scientific Wet Process Technology For Innovative Lsi Fpd Manufacturing

Author : Tadahiro Ohmi
ISBN : 9781420026863
Genre : Science
File Size : 78. 38 MB
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As science pushes closer toward the atomic size scale, new challenges arise to slow the pace of the miniaturization that has transformed our society and fueled the information age. New technologies are necessary to surpass these obstacles and realize the tremendous growth predicted by Moore's law. Assembled from the works of pioneering researchers, Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing presents new developments and technologies for producing the next generation of electronic circuits and displays. This book introduces radical-reaction-based semiconductor manufacturing technologies that overcome the limitations of the existing molecule-reaction-based technologies. It systematically details the procedures and underlying concepts involved in wet process technologies and applications. Following an introduction to semiconductor surface chemical electronics, expert contributors discuss the principles and technology of high-performance wet cleaning; etching technologies and processes; antistatic technology; wet vapor resist stripping technology; and process and safety technologies including waste reclamation, chemical composition control, and ultrapure water and liquid chemical supply systems and materials for fluctuation-free facilities. Currently, large production runs are needed to balance the costs of acquiring and tuning equipment for specialized operating conditions. Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing explains the technologies and processes used to meet the demand for variety and low volumes that exists in today's digital electronics marketplace.

Scientific Wet Process Technology For Innovative Lsi Fpd Manufacturing

Author : Tadahiro Ōmi
ISBN : 1351828274
Genre : Integrated circuits
File Size : 24. 37 MB
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Istc Cstic 2009 Cistc

Author : David Huang
ISBN : 9781566777032
Genre : Semiconductors
File Size : 32. 65 MB
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ISTC/CSTIC is an annual semiconductor technology conference covering all the aspects of semiconductor technology and manufacturing, including devices, design, lithography, integration, materials, processes, manufacturing as well as emerging semiconductor technologies and silicon material applications. ISTC/CSTIC 2009 was merged by ISTC (International Semiconductor Technology Conference) and CSTIC (China Semiconductor Technology International Conference), the two industry leading technical conferences in China, and consisted of one plenary session and nine technical symposia. This issue of ECS Transactions contains 159 papers from the conference.

Fedsm2007

Author : American Society of Mechanical Engineers. Fluids Engineering Division
ISBN : 0791842886
Genre : Science
File Size : 61. 60 MB
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