semiconductor industry wafer fab exhaust management

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Semiconductor Industry

Author : J. Michael Sherer
ISBN : 9781420027198
Genre : Technology & Engineering
File Size : 31. 25 MB
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Given the myriad exhaust compounds and the corresponding problems that they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, Semiconductor Industry: Wafer Fab Exhaust Management offers practical guidance on selecting an appropriate system for a given application. Using examples that provide a clear understanding of the concepts discussed, Sherer covers facility layout, support facilities operations, and semiconductor process equipment, followed by exhaust types and challenges. He reviews exhaust point-of-use devices and exhaust line requirements needed between process equipment and the centralized exhaust system. The book includes information on wet scrubbers for a centralized acid exhaust system and a centralized ammonia exhaust system and on centralized equipment to control volatile organic compounds. It concludes with a chapter devoted to emergency releases and a separate chapter of examples illustrating these systems in use. Drawing on the author's 20 years of industry experience, the book shows you how to customize strategies specific to your needs, solve current problems, and prevent future issues in your exhaust management systems.

Life Cycle Assessment Of Semiconductors

Author : Sarah B. Boyd
ISBN : 1441999884
Genre : Technology & Engineering
File Size : 47. 50 MB
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Life-Cycle Assessment of Semiconductors presents the first and thus far only available transparent and complete life cycle assessment of semiconductor devices. A lack of reliable semiconductor LCA data has been a major challenge to evaluation of the potential environmental benefits of information technologies (IT). The analysis and results presented in this book will allow a higher degree of confidence and certainty in decisions concerning the use of IT in efforts to reduce climate change and other environmental effects. Coverage includes but is not limited to semiconductor manufacturing trends by product type and geography, unique coverage of life-cycle assessment, with a focus on uncertainty and sensitivity analysis of energy and global warming missions for CMOS logic devices, life cycle assessment of flash memory and life cycle assessment of DRAM. The information and conclusions discussed here will be highly relevant and useful to individuals and institutions.

Green Manufacturing

Author : David A. Dornfeld
ISBN : 9781441960160
Genre : Technology & Engineering
File Size : 55. 30 MB
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Green Manufacturing: Fundamentals and Applications introduces the basic definitions and issues surrounding green manufacturing at the process,machine and system (including supply chain) levels. It also shows, by way of several examples from different industry sectors, the potential for substantial improvement and the paths to achieve the improvement. Additionally, this book discusses regulatory and government motivations for green manufacturing and outlines the path for making manufacturing more green as well as making production more sustainable. This book also: Discusses new engineering approaches for manufacturing and provides a path from traditional manufacturing to green manufacturing Addresses regulatory and economic issues surrounding green manufacturing Details new supply chains that need to be in place before going green Includes state-of-the-art case studies in the areas of automotive, semiconductor and medical areas as well as in the supply chain and packaging areas

Chimie En Micro Lectronique

Author : LE TIEC Yannick
ISBN : 9782746289185
Genre :
File Size : 22. 62 MB
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La microélectronique est un monde complexe dans lequel plusieurs sciences comme la physique, l’électronique, l’optique ou la mécanique, contribuent à créer des nano-objets fonctionnels. La chimie est particulièrement impliquée dans de nombreux domaines tels que la synthèse des matériaux, la pureté des fluides, des gaz, des sels, le suivi des réactions chimiques et de leurs équilibres ainsi que la préparation de surfaces optimisées et la gravure sélective de couches spécifiques. Au cours des dernières décennies, la taille des transistors s’est considérablement réduite et la fonctionnalité des circuits électroniques s’est accrue. Cette évolution a conduit à une interpénétration de la chimie et de la microélectronique exposée dans cet ouvrage. Chimie en microélectronique présente les chimies et les séquences utilisées lors des procédés de production de la microélectronique, des nettoyages jusqu’aux gravures des plaquettes de silicium, du rôle et de l’impact de leur niveau de pureté jusqu’aux procédés d’interconnexion des millions de transistors composant un circuit électronique. Afin d’illustrer la convergence avec le domaine de la santé, l’ouvrage expose les nouvelles fonctionnalisations spécifiques, tels que les capteurs biologiques ou les capteurs sur la personne.

Chemical Elements

Author :
ISBN :
Genre :
File Size : 24. 51 MB
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Semiconductor Industrial Hygiene Handbook

Author : David G. Baldwin
ISBN : 9780815518976
Genre : Technology & Engineering
File Size : 86. 56 MB
Format : PDF
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This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.

Industrial Engineering

Author :
ISBN : UCSD:31822006035745
Genre : Industrial engineering
File Size : 24. 21 MB
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Mites Of Greenhouses

Author : Zhi-Qiang Zhang
ISBN : 0851998410
Genre : Gardening
File Size : 60. 63 MB
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Mites are among the most important arthropods in greenhouses, both as pests causing economic injury to greenhouse crops, and as natural enemies used in the biological control of pest insects and other mites. Because of their minute size, mites are much less well known than insects. This book describes the biology, identification and control of such mites and the topics covered include an introduction to the Acari, illustrated keys to orders, families and selected species, the control of pest mites, and the role of beneficial mites in biological control. The book will be of interest to those working in entomology, crop protection and horticulture.

Mosfet Models For Vlsi Circuit Simulation

Author : Narain D. Arora
ISBN : 9783709192474
Genre : Computers
File Size : 65. 58 MB
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Metal Oxide Semiconductor (MOS) transistors are the basic building block ofMOS integrated circuits (I C). Very Large Scale Integrated (VLSI) circuits using MOS technology have emerged as the dominant technology in the semiconductor industry. Over the past decade, the complexity of MOS IC's has increased at an astonishing rate. This is realized mainly through the reduction of MOS transistor dimensions in addition to the improvements in processing. Today VLSI circuits with over 3 million transistors on a chip, with effective or electrical channel lengths of 0. 5 microns, are in volume production. Designing such complex chips is virtually impossible without simulation tools which help to predict circuit behavior before actual circuits are fabricated. However, the utility of simulators as a tool for the design and analysis of circuits depends on the adequacy of the device models used in the simulator. This problem is further aggravated by the technology trend towards smaller and smaller device dimensions which increases the complexity of the models. There is extensive literature available on modeling these short channel devices. However, there is a lot of confusion too. Often it is not clear what model to use and which model parameter values are important and how to determine them. After working over 15 years in the field of semiconductor device modeling, I have felt the need for a book which can fill the gap between the theory and the practice of MOS transistor modeling. This book is an attempt in that direction.

Physics Of Semiconductor Devices

Author : J.-P. Colinge
ISBN : 9780306476228
Genre : Technology & Engineering
File Size : 86. 27 MB
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Physics of Semiconductor Devices covers both basic classic topics such as energy band theory and the gradual-channel model of the MOSFET as well as advanced concepts and devices such as MOSFET short-channel effects, low-dimensional devices and single-electron transistors. Concepts are introduced to the reader in a simple way, often using comparisons to everyday-life experiences such as simple fluid mechanics. They are then explained in depth and mathematical developments are fully described. Physics of Semiconductor Devices contains a list of problems that can be used as homework assignments or can be solved in class to exemplify the theory. Many of these problems make use of Matlab and are aimed at illustrating theoretical concepts in a graphical manner.

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