semiconductor industry wafer fab exhaust management

Download Book Semiconductor Industry Wafer Fab Exhaust Management in PDF format. You can Read Online Semiconductor Industry Wafer Fab Exhaust Management here in PDF, EPUB, Mobi or Docx formats.

Semiconductor Industry

Author : J. Michael Sherer
ISBN : 9781420027198
Genre : Technology & Engineering
File Size : 28. 15 MB
Format : PDF, Mobi
Download : 616
Read : 529

Get This Book


Given the myriad exhaust compounds and the corresponding problems that they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, Semiconductor Industry: Wafer Fab Exhaust Management offers practical guidance on selecting an appropriate system for a given application. Using examples that provide a clear understanding of the concepts discussed, Sherer covers facility layout, support facilities operations, and semiconductor process equipment, followed by exhaust types and challenges. He reviews exhaust point-of-use devices and exhaust line requirements needed between process equipment and the centralized exhaust system. The book includes information on wet scrubbers for a centralized acid exhaust system and a centralized ammonia exhaust system and on centralized equipment to control volatile organic compounds. It concludes with a chapter devoted to emergency releases and a separate chapter of examples illustrating these systems in use. Drawing on the author's 20 years of industry experience, the book shows you how to customize strategies specific to your needs, solve current problems, and prevent future issues in your exhaust management systems.

Semiconductor Industry

Author : J. Michael Sherer
ISBN : 1351828258
Genre : Air
File Size : 67. 35 MB
Format : PDF, ePub
Download : 877
Read : 1243

Get This Book


Annotation Given the myriad exhaust compounds and the corresponding problems that they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, Semiconductor Industry: Wafer Fab Exhaust Management offers practical guidance on selecting an appropriate system for a given application. Using examples that provide a clear understanding of the concepts discussed, Sherer covers facility layout, support facilities operations, and semiconductor process equipment, followed by exhaust types and challenges. He reviews exhaust point-of-use devices and exhaust line requirements needed between process equipment and the centralized exhaust system. The book includes information on wet scrubbers for a centralized acid exhaust system and a centralized ammonia exhaust system and on centralized equipment to control volatile organic compounds. It concludes with a chapter devoted to emergency releases and a separate chapter of examples illustrating these systems in use. Drawing on the author's 20 years of industry experience, the book shows you how to customize strategies specific to your needs, solve current problems, and prevent future issues in your exhaust management systems.

Physics Of Semiconductor Devices

Author : J.-P. Colinge
ISBN : 9780306476228
Genre : Technology & Engineering
File Size : 55. 78 MB
Format : PDF, Kindle
Download : 759
Read : 1010

Get This Book


Physics of Semiconductor Devices covers both basic classic topics such as energy band theory and the gradual-channel model of the MOSFET as well as advanced concepts and devices such as MOSFET short-channel effects, low-dimensional devices and single-electron transistors. Concepts are introduced to the reader in a simple way, often using comparisons to everyday-life experiences such as simple fluid mechanics. They are then explained in depth and mathematical developments are fully described. Physics of Semiconductor Devices contains a list of problems that can be used as homework assignments or can be solved in class to exemplify the theory. Many of these problems make use of Matlab and are aimed at illustrating theoretical concepts in a graphical manner.

Industrial Engineering

Author :
ISBN : UCSD:31822006035745
Genre : Industrial engineering
File Size : 90. 73 MB
Format : PDF, Mobi
Download : 416
Read : 1005

Get This Book



Environmental Issues With Materials And Processes For The Electronics And Semiconductor Industries

Author : Laura Mendicino
ISBN : 1566773121
Genre : Electrochemistry
File Size : 46. 19 MB
Format : PDF, Kindle
Download : 368
Read : 416

Get This Book



Microchip Fabrication Sixth Edition

Author : Peter Van Zant
ISBN : 9780071821025
Genre : Technology & Engineering
File Size : 27. 35 MB
Format : PDF, Mobi
Download : 126
Read : 1156

Get This Book


The most complete, current guide to semiconductor processing Fully revised to cover the latest advances in the field, Microchip Fabrication, Sixth Edition explains every stage of semiconductor processing, from raw material preparation to testing to packaging and shipping the finished device. This practical resource provides easy-to-understand information on the physics, chemistry, and electronic fundamentals underlying the sophisticated manufacturing materials and processes of modern semiconductors. State-of-the-art processes and cutting-edge technologies used in the patterning, doping, and layering steps are discussed in this new edition. Filled with detailed illustrations and real-world examples, this is a comprehensive, up-to-date introduction to the technological backbone of the high-tech industry. COVERAGE INCLUDES: The semiconductor industry Properties of semiconductor materials and chemicals Crystal growth and silicon wafer preparation Wafer fabrication and packaging Contamination control Productivity and process yields Oxidation The ten-step patterning process--surface preparation to exposure; developing to final inspection Next generation lithography Doping Layer deposition Metallization Process and device evaluation The business of wafer fabrication Devices and integrated circuit formation Integrated circuits Packaging

An Introduction To The Theory Of The Boltzmann Equation

Author : Stewart Harris
ISBN : 9780486143828
Genre : Science
File Size : 82. 49 MB
Format : PDF, Mobi
Download : 409
Read : 681

Get This Book


This introductory graduate-level text emphasizes physical aspects of the theory of Boltzmann's equation in a detailed presentation that doubles as a practical resource for professionals. 1971 edition.

Life Cycle Assessment Of Semiconductors

Author : Sarah B. Boyd
ISBN : 1441999884
Genre : Technology & Engineering
File Size : 50. 84 MB
Format : PDF, ePub
Download : 617
Read : 868

Get This Book


Life-Cycle Assessment of Semiconductors presents the first and thus far only available transparent and complete life cycle assessment of semiconductor devices. A lack of reliable semiconductor LCA data has been a major challenge to evaluation of the potential environmental benefits of information technologies (IT). The analysis and results presented in this book will allow a higher degree of confidence and certainty in decisions concerning the use of IT in efforts to reduce climate change and other environmental effects. Coverage includes but is not limited to semiconductor manufacturing trends by product type and geography, unique coverage of life-cycle assessment, with a focus on uncertainty and sensitivity analysis of energy and global warming missions for CMOS logic devices, life cycle assessment of flash memory and life cycle assessment of DRAM. The information and conclusions discussed here will be highly relevant and useful to individuals and institutions.

American Book Publishing Record

Author :
ISBN : UOM:39015066043244
Genre : American literature
File Size : 83. 70 MB
Format : PDF, Docs
Download : 227
Read : 552

Get This Book



Introduction To Semiconductor Manufacturing Technology

Author : Hong Xiao
ISBN : 0130224049
Genre : House & Home
File Size : 61. 45 MB
Format : PDF, Kindle
Download : 873
Read : 910

Get This Book


For courses in Semiconductor Manufacturing Technology, IC Fabrication Technology, and Devices: Conventional Flow. This up-to-date text on semiconductor manufacturing processes takes into consideration the rapid development of the industry's technology. It thoroughly describes the complicated and new IC chip fabrication processes in detail with minimum mathematics, physics, and chemistry. Advanced technologies are covered along with older ones to assist students in understanding the development processes from a historic point of view.

Top Download:

Best Books