optical microscanners and microspectrometers using thermal bimorph actuators microsystems

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Optical Microscanners And Microspectrometers Using Thermal Bimorph Actuators

Author : Gerhard Lammel
ISBN : 9781475760835
Genre : Technology & Engineering
File Size : 20. 30 MB
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Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly. An advanced microscanning device capable of one- and two-dimensional scanning can be integrated in a compact barcode scanning system composed of a laser diode and adapted optics. The original design of the microscanner combines efficiently the miniaturized thermal mechanical actuator and the reflecting mirror, providing a one-dimensional scanning or an unique combination of two movements, depending on the geometry. The simplicity of the device makes it a competitive component. The authors rethink the design of a miniaturized optical device and find a compact solution for a microspectrometer, based on a tunable filter and a single pixel detector. A porous silicon technology combines efficiently the optical filter function with a thermal mechanical actuator on chip. The methodology for design and process calibration are discussed in detail. The device is the core component of an infrared gas spectrometer.

Mems Nems

Author : Cornelius T. Leondes
ISBN : 9780387257860
Genre : Technology & Engineering
File Size : 41. 45 MB
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This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Principles And Applications Of Nanomems Physics

Author : Hector Santos
ISBN : 9780387258348
Genre : Technology & Engineering
File Size : 46. 50 MB
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Presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications Provides newcomers with a much needed coherent scientific base for undertaking study and research in this field Takes great pains in rendering transparent advanced physical concepts and techniques, such as quantum information, second quantization, Luttinger liquids, bosonization, and superconductivity

Biomems

Author : Gerald Urban
ISBN : 9780387287324
Genre : Medical
File Size : 44. 2 MB
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Explosive growth in the field of microsystem technology (MST) has introduced a variety of promising products in major disciplines from microelectronics to life sciences. Especially the life sciences and health care business was, and is expected to be a major market for MST products. Undoubtedly the merging of biological sciences with micro- and nanoscience will create a scientific and technological revolution in future. Microminiaturization of devices, down to the nanoscale, approaching the size of biological structures, will be a prerequisite for the future success of life sciences. Bioanalytical and therapeutic micro- and nanosystems will be mandatory for system biologists in the long run, to obtain insight into morphology, the function and the interactive processes of the living system. With such a deeper understanding new and personalized drugs could be developed leading to a revolution in life sciences. Today, microanalytical devices are used in clinical analytics or molecular biology as gene chips. In parallel, standard microbiomedical products are employed in the intensive care and surgical theatre, mainly for monitoring and implantation purposes. The gap between these two different scientific fields will be closed, however, as soon as functional micro devices can be produced, allowing a deeper view into the function of cells and whole organisms. Here, a new discipline evolved which focuses on microsystems for living systems called "BIOMEMS". In this review at a glance the exciting field of bio-microsystems, from their beginnings to indicators of future successes are presented. It will also show that a broad penetration of micro and nano technologies into biology and medicine will be mandatory for future scientific and new product development progress in life science.

Smart Structures Devices And Systems

Author : Said F. Al-Sarawi
ISBN : 0819456098
Genre : Microelectromechanical systems
File Size : 23. 50 MB
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